Robot

ABSTRACT

A robot includes a base, first and second arms, first and second drive sources, first and second inertia sensors, and first and second angle sensors. A rotation axis of the first arm and a rotation axis of the second arm are orthogonal to each other. The first inertia sensor is installed at the first arm, and the second inertia sensor is installed at the second arm. The first angle sensor is installed at the first drive source, and the second angle sensor is installed at the second drive source. Angular velocities obtained from the first inertia sensor and the first angle sensor are fed back to a first drive source control unit. Angular velocities obtained from the second inertia sensor and the second angle sensor are fed back to a second drive source control unit.

BACKGROUND

1. Technical Field

The present invention relates to a robot.

2. Related Art

A multi-axis robot that includes a base and a plurality of rotatablearms and that works freely in a three-dimensional space has a problem inthat vibration is easily generated in the arms due to the rotation ofthe arms or the disturbance applied to the arms. For the purpose ofattenuating the problems of vibration, a known robot includes avibration suppressing control technique using acceleration sensors thatare provided on an arm closest to the tip side and detect accelerationin the directions of three axes including the X-axis, the Y-axis, andthe Z-axis (for example, refer to JP-A-10-100085). Another knownmulti-axis robot includes a base and a plurality of arms and has therotation axes of the arms parallel to each other and provides angularvelocity sensors on the arms, respectively, and is controlled bycalculations that also include the components detected using the angularvelocity sensors (for example, refer to JP-A-2005-242794).

However, the robots described in JP-A-10-100085 and JP-A-2005-242794have the following drawbacks.

In the robot of JP-A-10-100085, the acceleration sensor is installed atthe tip portion of the arm link portion closest to the tip side. Thus,the acceleration detected by the acceleration sensor is converted andcorrected into those for the respective joint portions. At this time,since it is necessary to perform a coordinate axis transformationreferred to as the Jacobi's transformation, and a matrix calculationhaving a number of sine and cosine factors is required, the amount ofcalculations becomes huge. Since it is necessary to calculate thefactors according to the rotation angles of the motors of the respectivejoint portions that change every moment, it is always necessary toexecute huge calculations. Accordingly, there is a drawback in that theresponse speed becomes slow.

Additionally, since accurate acceleration or speed cannot be fed back ifcalculation precision declines, vibration suppression capability maydecline or control performance may be impaired. For this reason, thereis a restriction on the design of a control system such that ahigh-speed computing unit is required, for example.

Additionally, in the calculation of the coordinate axis transformation,there is a region (incalculable region) with no coordinate axistransformation solution referred to as a singular point. In this region,the vibration suppression capability may decline or vibration may beincreased instead.

In the robot of JP-A-2005-242794, since the rotation axes of the armsare parallel to each other and the directions of the components detectedby the angular velocity sensors are the same, a calculation and controlmethod in which different rotational components are mixed are not takeninto consideration. Accordingly, even if this technique is adopted for amulti-axis robot in which the rotation axes of the arms are differentfrom each other, vibration suppression capability cannot be satisfied.

SUMMARY

An advantage of some aspects of the disclosure is to provide amulti-axis robot that can easily and reliably suppress vibration in arobot that includes a plurality of arms and has the rotation axes of thearms different from each other.

Application Example 1

This application example is directed to a robot including a base; afirst arm that is coupled to the base and rotates with a first rotationaxis as an axial center; a second arm that is coupled to the first armand rotates with a second rotation axis in a direction orthogonal to thefirst rotation axis as an axial center; a first drive source thatrotates the first arm through a first angular velocity command; a firstinertia sensor that is installed at the first arm and detects theangular velocity or acceleration of the first rotation axis of the firstarm; a first angle sensor that detects the rotation angle of the firstdrive source; a second drive source that rotates the second arm througha second angular velocity command; a second inertia sensor that isinstalled at the second arm and detects the angular velocity oracceleration of the second rotation axis of the second arm; a secondangle sensor that detects the rotation angle of the second drive source;a first drive source control unit that feeds back a first correctioncomponent, which is derived from an angular velocity ωA1 of the firstrotation axis of the first arm obtained from the first inertia sensorand an angular velocity ωA1 m of the first rotation axis of the firstarm obtained from the first angle sensor, and controls the first drivesource; and a second drive source control unit that feeds back a secondcorrection component, which is derived from an angular velocity ωA2 ofthe second rotation axis of the second arm obtained from the secondinertia sensor, and an angular velocity ωA2 m of the second rotationaxis of the second arm obtained from the second angle sensor, andcontrols the second drive source.

With this configuration, the vibration in the robot can be easily andreliably suppressed.

That is, a huge calculation is unnecessary, and thereby, the responsespeed in the control of the robot can be increased. Additionally, sincea calculation in which a singular point is present is unnecessary, thecontrol of the robot can be reliably performed, and vibration can bereliably suppressed.

Additionally, since the inertia sensors are installed at the first armand the second arm, respectively, and the rotation axis for the rotationof the first arm and the rotation axis for the rotation of the secondarm are made orthogonal to each other, the angular velocities of therespective arms can be detected as simple rotational components in whichthese velocities are not mixed. Hence, since control is performed by thecalculation using these velocities, the vibration in the robot can bemore easily, accurately, and reliably suppressed.

Application Example 2

In the robot of the application example, it is preferable that the robotfurther includes the first drive source control unit that feeds back thefirst angular velocity command by the first correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA1 m from the angular velocity ωA1, by a feedbackgain; and the second drive source control unit that feeds back thesecond angular velocity command by the second correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA2 m from the angular velocity ωA2, by a feedbackgain.

With this configuration, the vibration in the robot can be more reliablysuppressed. In addition, since the rotation axis for the rotation of thefirst arm and the rotation axis for the rotation of the second arm aremade orthogonal to each other, the angular velocities of the respectivearms can be detected as simple rotational components in which thesevelocities are not mixed. Since the rotational components with nomixture of these velocities are multiplied by feedback gains,respectively, the respective rotational components can be corrected withhigh precision. Hence, since control is performed by the calculationusing these velocities, the vibration in the robot can be more easily,accurately, and reliably suppressed.

Application Example 3

This application example is directed to a robot including a base; afirst arm that is coupled to the base and rotates with a first rotationaxis as an axial center; a second arm that is coupled to the first armand rotates with a second rotation axis in a direction orthogonal to thefirst rotation axis as an axial center; a third arm that rotates with athird rotation axis in a direction parallel to the second rotation axisas an axial center; a first drive source that rotates the first armthrough a first angular velocity command; a first inertia sensor that isinstalled at the first arm and detects the angular velocity oracceleration of the first rotation axis of the first arm; a first anglesensor that detects the rotation angle of the first drive source; asecond drive source that rotates the second arm through a second angularvelocity command; a second inertia sensor that is installed at thesecond arm and detects the angular velocity or acceleration of thesecond rotation axis of the second arm; a second angle sensor thatdetects the rotation angle of the second drive source; a third drivesource that rotates the third arm through a third angular velocitycommand; a third inertia sensor that is installed at the third arm anddetects the angular velocity or acceleration of the second rotation axisof the third arm; a third angle sensor that detects the rotation angleof the third drive source; a first drive source control unit that feedsback a first correction component, which is derived from an angularvelocity ωA1 of the first rotation axis of the first arm obtained fromthe first inertia sensor and an angular velocity ωA1 m of the firstrotation axis of the first arm obtained from the first angle sensor, andcontrols the first drive source; a second drive source control unit thatfeeds back a second correction component, which is derived from anangular velocity ωA2 of the second rotation axis of the second armobtained from the second inertia sensor, an angular velocity ωA2 m ofthe second rotation axis of the second arm obtained from the secondangle sensor, and controls the second drive source; and a third drivesource control unit that feeds back a third correction component, whichis derived from the angular velocity ωA2, an angular velocity ωA3 of thesecond rotation axis of the third arm obtained from the third inertiasensor, and an angular velocity ωA3 m of the third rotation axis of thethird arm obtained from the third angle sensor, and controls the thirddrive source.

With this configuration, the vibration in the robot can be easily andreliably suppressed.

That is, a huge calculation is unnecessary, and thereby, the responsespeed in the control of the robot can be increased. Additionally, sincea calculation in which a singular point is present is unnecessary, thecontrol of the robot can be reliably performed, and vibration can bereliably suppressed.

Additionally, since the inertia sensors are installed at the respectivearms and the control of suppressing the vibration is performed on therespective arms, the vibration in the robot can be more reliablysuppressed.

Additionally, since the inertia sensors are installed at the first arm,the second arm, and the third arm, respectively, and the rotation axisfor the rotation of the first arm and the rotation axis for the rotationof the second arm are made orthogonal to each other, and the rotationaxis for the rotation of the second arm and the rotational axis for therotation of the third arm are made parallel to each other, the angularvelocities of the respective arms can be detected as simple rotationalcomponents in which these velocities are not mixed. Hence, since controlis performed by the calculation using these velocities, the vibration inthe robot can be more easily, accurately, and reliably suppressed.

Application Example 4

In the robot of the application example, it is preferable that the robotfurther includes the first drive source control unit that feeds back thefirst angular velocity command by the first correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA1 m from the angular velocity ωA1, by a feedbackgain; the second drive source control unit that feeds back the secondangular velocity command by the second correction component obtained bymultiplying a value, which is obtained by subtracting the angularvelocity ωA2 m from the angular velocity ωA2, by a feedback gain; andthe third drive source control unit that feeds back the third angularvelocity command by the third correction component obtained bymultiplying a value, which is obtained by subtracting the angularvelocity ωA2 and the angular velocity ωA3 m from the angular velocityωA3, by a feedback gain.

With this configuration, the vibration in the robot can be more reliablysuppressed. In addition, since the rotation axis for the rotation of thefirst arm and the rotation axis for the rotation of the second arm aremade orthogonal to each other and the rotation axis for the rotation ofthe second arm and the rotational axis for the rotation of the third armare made parallel to each other, the angular velocities of therespective arms can be detected as simple rotational components in whichthese velocities are not mixed. Since the rotational components with nomixture of these velocities are multiplied by feedback gains,respectively, the respective rotational components can be corrected withhigh precision. Hence, since control is performed by the calculationusing these velocities, the vibration in the robot can be more easily,accurately, and reliably suppressed.

Application Example 5

This application example is directed to a robot including a base; afirst arm that is coupled to the base and rotates with a first rotationaxis as an axial center; a second arm that is coupled to the first armand rotates with a second rotation axis in a direction orthogonal to thefirst rotation axis as an axial center; a third arm that rotates with athird rotation axis in a direction parallel to the second rotation axisas an axial center; a first drive source that rotates the first armthrough a first angular velocity command; a first inertia sensor that isinstalled at the first arm and detects the angular velocity oracceleration of the first rotation axis of the first arm; a first anglesensor that detects the rotation angle of the first drive source; asecond drive source that rotates the second arm through a second angularvelocity command; a second inertia sensor that is installed at thesecond arm and detects the angular velocity or acceleration of thesecond rotation axis of the second arm; a second angle sensor thatdetects the rotation angle of the second drive source; a third drivesource that rotates the third arm through a third angular velocitycommand; a third inertia sensor that is installed at the third arm anddetects the angular velocity or acceleration of the second rotation axisof the third arm; a third angle sensor that detects the rotation angleof the third drive source; a first drive source control unit that feedsback a first correction component, which is derived from an angularvelocity ωA1 of the first rotation axis of the first arm obtained fromthe first inertia sensor and an angular velocity ωA1 m of the firstrotation axis of the first arm obtained from the first angle sensor, andcontrols the first drive source; a second drive source control unit thatfeeds back a second correction component, which is derived from anangular velocity ωA3 of the second rotation axis of the third armobtained from the third inertia sensor, an angular velocity ωA2 m of thesecond rotation axis of the second arm obtained from the second anglesensor, and an angular velocity ωA3 m of the third rotation axis of thethird arm obtained from the third angle sensor, and controls the seconddrive source; and a third drive source control unit that feeds back athird correction component, which is derived from an angular velocityωA2 of the second rotation axis of the second arm obtained from thesecond inertia sensor, the angular velocity ωA3, and the angularvelocity ωA3 m, and controls the third drive source.

With this configuration, the vibration in the robot can be easily andreliably suppressed.

That is, a huge calculation is unnecessary, and thereby, the responsespeed in the control of the robot can be increased. Additionally, sincea calculation in which a singular point is present is unnecessary, thecontrol of the robot can be reliably performed, and vibration can bereliably suppressed.

Additionally, since the inertia sensors are installed at the respectivearms and the control of suppressing the vibration is performed on therespective arms, the vibration in the robot can be more reliablysuppressed.

Particularly, since the second drive source control unit performs thecontrol of suppressing vibration on the second drive source thatcontrols the operation of the second drive source, that is, rotates thesecond arm by the angular velocities ωA3, ωA2 m, and ωA3 m, using thedetection result of the third inertia sensor installed at the third armwhere a larger vibration than the second arm is generated, the effect ofsuppressing the vibration can be enhanced.

Application Example 6

In the robot of the application example, it is preferable that the robotfurther includes the first drive source control unit that feeds back thefirst angular velocity command by the first correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA1 m from the angular velocity ωA1, by a feedbackgain; the second drive source control unit that feeds back the secondangular velocity command by the second correction component obtained bymultiplying a value, which is obtained by subtracting the angularvelocity ωA2 m and the angular velocity ωA3 m from the angular velocityωA3, by a feedback gain; and the third drive source control unit thatfeeds back the third angular velocity command by the third correctioncomponent obtained by multiplying a value, which is obtained bysubtracting the angular velocity ωA2 and the angular velocity ωA3 m fromthe angular velocity ωA3, by a feedback gain.

Accordingly, the vibration in the robot can be more reliably suppressed.In addition, since the rotation axis for the rotation of the first armand the rotation axis for the rotation of the second arm are madeorthogonal to each other and the rotation axis for the rotation of thesecond arm and the rotational axis for the rotation of the third arm aremade parallel to each other, the angular velocities of the respectivearms can be detected as simple rotational components in which thesevelocities are not mixed. Since the rotational components with nomixture of these velocities are multiplied by feedback gains,respectively, the respective rotational components can be corrected withhigh precision. Hence, since control is performed by the calculationusing these velocities, the vibration in the robot can be more easily,accurately, and reliably suppressed. Particularly, in the second drivesource control unit, a value including a component detected by the thirdinertia sensor is multiplied by a feedback gain. Thus, the effect ofsuppressing vibration can be further enhanced.

Application Example 7

This application example is directed to a robot including a base; afirst arm that is coupled to the base and rotates with a first rotationaxis as an axial center; a second arm that is coupled to the first armand rotates with a second rotation axis in a direction orthogonal to thefirst rotation axis as an axial center; a third arm that rotates with athird rotation axis in a direction parallel to the second rotation axisas an axial center; a first drive source that rotates the first armthrough a first angular velocity command; a first inertia sensor that isinstalled at the first arm and detects the angular velocity oracceleration of the first rotation axis of the first arm; a first anglesensor that detects the rotation angle of the first drive source; asecond drive source that rotates the second arm through a second angularvelocity command; a second inertia sensor that is installed at thesecond arm and detects the angular velocity or acceleration of thesecond rotation axis of the second arm; a second angle sensor thatdetects the rotation angle of the second drive source; a third drivesource that rotates the third arm through a third angular velocitycommand; a third inertia sensor that is installed at the third arm anddetects the angular velocity or acceleration of the second rotation axisof the third arm; a third angle sensor that detects the rotation angleof the third drive source; an angle detection unit that detects that thearm angle formed between an axis of the second arm and an axis of thethird arm; a first drive source control unit that feeds back a firstcorrection component, which is derived from an angular velocity ωA1 ofthe first rotation axis of the first arm obtained from the first inertiasensor and an angular velocity ωA1 m of the first rotation axis of thefirst arm obtained from the first angle sensor, and controls the firstdrive source; a second drive source control unit that feeds back eithera value which is derived from an angular velocity ωA3 of the secondrotation axis of the third arm obtained from the third inertia sensor,an angular velocity ωA2 m of the second rotation axis of the second armobtained from the second angle sensor, and an angular velocity ωA3 m ofthe third rotation axis of the third arm obtained from the third anglesensor, or a value which is derived from an angular velocity ωA2 of thesecond rotation axis of the second arm obtained from the second inertiasensor, and the angular velocity ωA2 m, as a second correction componentaccording to the arm angle, and controls the second drive source; and athird drive source control unit that feeds back a third correctioncomponent, which is derived from the angular velocity ωA2, the angularvelocity ωA3, and the angular velocity ωA3 m, and controls the thirddrive source.

With this configuration, the vibration in the robot can be easily andreliably suppressed.

That is, a huge calculation is unnecessary, and thereby, the responsespeed in the control of the robot can be increased. Additionally, sincea calculation in which a singular point is present is unnecessary, thecontrol of the robot can be reliably performed, and vibration can bereliably suppressed.

Additionally, since the inertia sensors are installed at the respectivearms and the control of suppressing the vibration is performed on therespective arms, the vibration in the robot can be more reliablysuppressed.

Particularly, since the second drive source control unit selects andfeeds back either a value derived from the angular velocity ωA3, theangular velocity ωA2 m, and the angular velocity ωA3 m or a valuederived from the angular velocity ωA2 and the angular velocity ωA2 m onthe basis of the detection results of the angle detection unit, thecompatibility between the effect of suppressing vibration and thestability of control can be achieved.

Application Example 8

In the robot of the application example, it is preferable that the robotfurther includes the first drive source control unit that feeds back thefirst angular velocity command by the first correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA1 m from the angular velocity ωA1, by a feedbackgain; the second drive source control unit that feeds back the secondangular velocity command, using either a value obtained by multiplying avalue, which is obtained by subtracting the angular velocity ωA2 m andthe angular velocity ωA3 m from the angular velocity ωA3, by a feedbackgain, or a value obtained by multiplying a value, which is obtained bysubtracting the angular velocity ωA2 m from the angular velocity ωA2, bya feedback gain, as the second correction component; and the third drivesource control unit that feeds back the third angular velocity commandby the third correction component obtained by multiplying a value, whichis obtained by subtracting the angular velocity ωA2 and the angularvelocity ωA3 m from the angular velocity ωA3, by a feedback gain.

With this configuration, the vibration in the robot can be more reliablysuppressed.

Application Example 9

In the robot of the application example, it is preferable that the robotfurther includes the second drive source control unit that feeds backthe second angular velocity command by the second correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA2 m and the angular velocity ωA3 m from the angularvelocity ωA3, by a feedback gain when the arm angle is equal to orlarger than a first threshold and is equal to or smaller than a secondthreshold that is larger than the first threshold and that feeds backthe second angular velocity command by the second correction componentobtained by multiplying a value, which is obtained by subtracting theangular velocity ωA2 m from the angular velocity ωA2, by a feedback gainwhen the arm angle is smaller than the first threshold or larger thanthe second threshold.

Accordingly, the compatibility between enhancing the effect ofsuppressing vibration and the stability of control can be more reliablyachieved.

That is, when the angle θ formed between the axis of the second arm andthe axis of the third arm is equal to or larger than the first thresholdand equal to or smaller than the second threshold (extended posture),the control of the robot is stable but the inertia moment of the robotis large and the vibration in the robot is large, compared to a case(folded posture) where the angle θ formed between the axis of the secondarm and the axis of the third arm is smaller than the first threshold orlarger than the second threshold. Thus, the effect of suppressingvibration can be enhanced by feeding back the second angular velocitycommand by the second correction component obtained by multiplying avalue, which is obtained by subtracting the angular velocity ωA2 m andthe angular velocity ωA3 m from the angular velocity ωA3, by a feedbackgain.

That is, when the angle θ formed between the axis of the second arm andthe axis of the third arm is smaller than the first threshold or largerthan the second threshold, the inertia moment of the robot is small andthe vibration in the robot is small but control tends to become unstableand the robot vibrates easily, compared to a case where the angle θformed between the axis of the second arm and the axis of the third armis equal to or larger than the first threshold and equal to or smallerthan the second threshold. Thus, the vibration in the robot can beprevented and control can be stabilized, by feeding back the secondangular velocity command by the second correction component obtained bymultiplying a value, which is obtained by subtracting the angularvelocity ωA2 m from the angular velocity ωA2, by a feedback gain.

Application Example 10

In the robot of the application example, it is preferable that the firstthreshold is set within a range of 45° to 135°, and the second thresholdis set within a range of 225° to 315°.

With this configuration, the compatibility between enhancing the effectof suppressing vibration and the stability of control can be morereliably achieved.

Application Example 11

In the robot of the application example, it is preferable that the firstinertia sensor is installed at a tip portion in the rotation of thefirst arm, and the second inertia sensor is installed at a tip portionin the rotation of the second arm.

With this configuration, since the first inertia sensor detects theangular velocity or acceleration of the first arm in a region where thevibration in the first arm is at the maximum and the second inertiasensor detects the angular velocity or acceleration of the second arm ina region where the vibration in the second arm is at the maximum, thevibration in the robot can be more reliably suppressed.

Application Example 12

In the robot of the application examples, it is preferable that thefirst inertia sensor is installed at a tip portion in the rotation ofthe first arm, the second inertia sensor is installed at a tip portionin the rotation of the second arm, and the third inertia sensor isinstalled at a tip portion in the rotation of the third arm.

With this configuration, since the first inertia sensor detects theangular velocity or acceleration of the first arm in a region where thevibration in the first arm is at the maximum, the second inertia sensordetects the angular velocity or acceleration of the second arm in aregion where the vibration in the second arm is at the maximum, and thethird inertia sensor detects the angular velocity or acceleration of thethird arm in a region where the vibration in the third arm is at themaximum, the vibration in the robot can be more reliably suppressed.

Application Example 13

In the robot of the application example, it is preferable that the firstrotation axis coincides with the normal line of an installation surfaceof the base.

With this configuration, the robot can be easily controlled.

Application Example 14

This application example is directed to a robot including a base; afirst arm that is coupled to the base and rotates with a first rotationaxis as an axial center; a second arm that rotates with a secondrotation axis orthogonal to the first rotation axis as an axial center;a first inertia sensor that detects the angular velocity of the firstarm; a first angle sensor that detects the rotation angle of a drivesource of the first arm; a second inertia sensor that detects theangular velocity of the second arm; a second angle sensor that detectsthe rotation angle of a drive source of the second arm; a control unitof the drive source of the first arm that feeds back an angular velocityderived from a detection result of the first angle sensor and an angularvelocity detected from the first inertia sensor; and a control unit ofthe drive source of the second arm that feeds back an angular velocityderived from a detection result of the second angle sensor and anangular velocity detected from the second inertia sensor.

With this configuration, it is possible to provide a multi-joint robotthat can freely work in a three-dimensional space but easily andreliably suppresses vibration caused by driving.

In the robot of the application example, since the arms are coupled sothat the rotation axes orthogonal to each other or the rotation axesparallel to each other are mixed, information from one inertia sensormay be only information on at least one coordinate axis. Accordingly,for example, coordinate axis transformation, such as the Jacobi'stransformation, is unnecessary, and feedback to the controller can beperformed using a simple calculation.

That is, a calculation for performing feedback to the controller on thebasis of huge information is unnecessary, and thereby, the responsespeed in the control of the robot can be increased. Additionally, sincea calculation in which a singular point is present is unnecessary, thecontrol of the robot can be reliably performed, and vibration can bereliably suppressed. In addition, although the control unit of the drivesource of the first arm and the control unit of the drive source of thesecond arm are built on mutually independent calculation circuits, thecontrol units can be built on the same IC circuit.

Application Example 15

This application example is directed to a robot including a plurality oforthogonal rotation axes, one inertia sensor and one angle sensor areprovided so as to correspond to each of the orthogonal rotation axes,and angular velocities obtained from the angle sensor and the inertiasensor are feedback-controlled for every rotation axis corresponding tothe angle sensor and the inertia sensor.

With this configuration, it is possible to provide a multi-joint robotthat can freely work in a three-dimensional space but easily andreliably suppresses vibration caused by driving.

Since the robot of the application example includes a plurality oforthogonal rotation axes, one inertia sensor and one angle sensor areprovided so as to correspond to each of the orthogonal rotation axes,and angular velocities obtained from the angle sensor and the inertiasensor are feedback-controlled for every rotation axis corresponding tothe angle sensor and the inertia sensor, information from the inertiasensor may be only information on at least one coordinate axis.Accordingly, for example, coordinate axis transformation, such as theJacobi's transformation, is unnecessary, and feedback to the controllercan be performed using a simple calculation.

That is, a calculation for performing feedback to the controller on thebasis of huge information is unnecessary, and thereby, the responsespeed in the control of the robot can be increased. Additionally, sincea calculation in which a singular point is present is unnecessary, thecontrol of the robot can be reliably performed, and vibration can bereliably suppressed. In addition, when one inertia sensor and one anglesensor may be provided so as to correspond to every orthogonal rotationaxis, and a plurality of parallel rotation axes are present, onerotation axis of them may be selected from a rotation axis orthogonal tothe one rotation axis, and one inertia sensor and one angle sensor maybe provided for these rotation axes, respectively.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will be described with reference to theaccompanying drawings, wherein like numbers reference like elements.

FIG. 1 is the perspective view when a first embodiment of a robot isviewed from the front side.

FIG. 2 is a perspective view when the robot shown in FIG. 1 is viewedfrom the back side.

FIG. 3 is a schematic view of the robot shown in FIG. 1.

FIG. 4 is a schematic view of the robot shown in FIG. 1.

FIG. 5 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 6 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 7 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 8 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 9 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 10 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 11 is a block diagram of portions of the robot shown in FIG. 1.

FIG. 12 is a schematic view showing a second embodiment of a robot.

FIG. 13 is a block diagram of portions of the robot shown in FIG. 12.

FIG. 14 is a block diagram showing portions of a third embodiment of arobot.

FIG. 15 is a schematic view showing a fourth embodiment of a robot.

FIG. 16 is a block diagram of portions of the robot shown in FIG. 15.

FIG. 17 is a front view showing another configuration example of arobot.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

A robot will be described below in detail on the basis of preferredembodiments shown in the accompanying drawings.

First Embodiment

FIG. 1 is the perspective view when a first embodiment of a robot isviewed from the front side. FIG. 2 is a perspective view when the robotshown in FIG. 1 is viewed from the back side. FIGS. 3 and 4 areschematic views of the robot shown in FIG. 1, respectively. FIG. 5 is ablock diagram of portions of the robot shown in FIG. 1, and FIGS. 6 to11 are block diagrams of portions of the robot shown in FIG. 1,respectively.

In addition, in the following, for convenience of description, the upperside in FIGS. 1 to 4 is referred to as “upper” or “upside” and the lowerside is referred to as “lower” or “downside”. Additionally, the baseside in FIGS. 1 to 4 is referred to as a “base end”, and the oppositeside is referred to as a “tip”. Additionally, the rotation axes O2 andO3 are shown in an exaggerated manner in FIG. 4, respectively.Additionally, inertia sensors 31 and 32 are shown outside arms 12 and 13in FIG. 4, respectively, in order to clarify the presence of thesensors.

A robot (industrial robot) 1 shown in FIGS. 1 to 4 can be used for, forexample, a manufacturing process that manufactures precision mechanicalequipment, such as a wrist watch, and has a robot body 10 and a controldevice (control unit) 20 (refer to FIG. 5) that controls the operationof the robot body 10. The robot body 10 and the control device 20 areelectrically connected. Additionally, the control device 20 can beconstituted by, for example, a personal computer (PC) in which a centralprocessing unit (CPU) is built. In addition, the control device 20 isdescribed below in more detail.

The robot body 10 includes a base 11, four arms (links) 12, 13, 14, and15, a wrist (link) 16, and six drive sources 401, 402, 403, 404, 405,and 406. The robot body 10 is a vertical multi-joint (six-axis) robot(robot body) in which the base 11, the arms 12, 13, 14, and 15, and thewrist 16 are coupled together in the order from a base end side toward atip side. In the vertical multi-joint robot, the base 11, the arms 12 to15, and the wrist 16 can also be collectively referred to as “arms”, andthe arm 12, the arm 13, the arm 14, the arm 15, and the wrist 16 can bereferred to as a “first arm”, a “second arm”, a “third arm”, a “fourtharm”, and a “fifth or sixth arm”, respectively. In addition, the wrist16 may have the fifth arm and the sixth arm. An end effector or the likecan be attached to the wrist 16.

As shown in FIGS. 3 and 4, the arms 12 to 15 and the wrist 16 aresupported so as to be independently displaceable with respect to thebase 11. The lengths of the arms 12 to 15 and the wrist 16 are notparticularly limited, respectively. However, in the illustratedconfiguration, the lengths of the arms 12 to 14 are set to be largerthan those of the other arm 15 and the wrist 16. In addition, forexample, the length of the third arm 14 may be made smaller than thelengths of the first arm 12 and the second arm 13.

The base 11 and the first arm 12 are coupled together via a joint 171.The first arm 12 has a first rotation axis O1 parallel to the verticaldirection as a rotation center, and is rotatable with respect to thebase 11 around the first rotation axis O1. The first rotation axis O1coincides with the normal line of an upper surface of a floor 101 thatis an installation surface of the base 11. The rotation around the firstrotation axis O1 is performed by the driving of the first drive source401. Additionally, the first drive source 401 is driven by a motor 401Mand a cable (not shown), and the motor 401M is controlled by the controldevice 20 via a motor driver 301 that is electrically connected thereto(refer to FIG. 5). The driving from the motor 401M may be transmitted tothe first drive source 401 by a speed reducer (not shown) providedtogether with the motor 401M, and the speed reducer may be omitted.

The first arm 12 and the second arm 13 are coupled together via a joint172. The second arm 13 is rotatable with respect to the first arm 12with the second rotation axis O2 parallel to the horizontal direction asan axial center. The second rotation axis O2 is orthogonal to the firstrotation axis O1. The rotation around the second rotation axis O2 isperformed by the driving of the second drive source 402. Additionally,the second drive source 402 is driven by a motor 402M and a cable (notshown), and the motor 402M is controlled by the control device 20 via amotor driver 302 that is electrically connected thereto (refer to FIG.5). The driving from the motor 402M may be transmitted to the seconddrive source 402 by a speed reducer (not shown) provided in addition tothe motor 402M, and the speed reducer may be omitted.

The second arm 13 and the third arm 14 are coupled together via a joint173. The third arm 14 has a rotation axis O3 parallel to the horizontaldirection as a rotation center, and is rotatable with respect to thesecond arm 13 around the third rotation axis O3. The third rotation axisO3 is parallel to the second rotation axis O2. The rotation around thethird rotation axis O3 is performed by the driving of the third drivesource 403. Additionally, the third drive source 403 is driven by amotor 403M and a cable (not shown), and the motor 403M is controlled bythe control device 20 via a motor driver 303 that is electricallyconnected thereto (refer to FIG. 5). The driving from the motor 403M maybe transmitted to the third drive source 403 by a speed reducer (notshown) provided in addition to the motor 403M, and the speed reducer maybe omitted.

The third arm 14 and the fourth arm 15 are coupled together via a joint174. The fourth arm 15 has a fourth rotation axis O4 parallel to thedirection of a central axis of the third arm 14 as a rotation center,and is rotatable with respect to the third arm 14 (base 11) around thefourth rotation axis O4. The fourth rotation axis O4 is orthogonal tothe third rotation axis O3. The rotation around the fourth rotation axisO4 is performed by the driving of the fourth drive source 404.Additionally, the fourth drive source 404 is driven by a motor 404M anda cable (not shown), and the motor 404M is controlled by the controldevice 20 via a motor driver 304 that is electrically connected thereto(refer to FIG. 5). The driving from the motor 404M may be transmitted tothe fourth drive source 404 by a speed reducer (not shown) providedtogether with the motor 404M, and the speed reducer may be omitted. Inaddition, the fourth rotation axis O4 may be parallel to an axisorthogonal to the third rotation axis O3.

The fourth arm 15 and the wrist 16 are coupled together via a joint 175.The wrist 16 has a fifth rotation axis O5 parallel to the horizontaldirection (y-axis direction) as a rotation center, and is rotatable withrespect to the fourth arm 15 around the fifth rotation axis O5. Thefifth rotation axis O5 is orthogonal to the fourth rotation axis O4. Therotation around the fifth rotation axis O5 is performed by the drivingof the fifth drive source 405. Additionally, the fifth drive source 405is driven by a motor 405M and a cable (not shown), and the motor 405M iscontrolled by the control device 20 via a motor driver 305 that iselectrically connected thereto (refer to FIG. 5). The driving from themotor 405M may be transmitted to the fifth drive source 405 by a speedreducer (not shown) provided together with the motor 405M, and the speedreducer may be omitted. Additionally, the wrist 16 has a sixth rotationaxis O6 vertical to the fifth rotation axis O5 as a rotation center, andis also rotatable via a joint 176 around the sixth rotation axis O6. Therotation axis O6 is orthogonal to the rotation axis O5. The rotationaround the sixth rotation axis O6 is performed by the driving of thesixth drive source 406. Additionally, the sixth drive source 406 isdriven by a motor 406M and a cable (not shown), and the motor 406M iscontrolled by the control device 20 via a motor driver 306 that iselectrically connected thereto (refer to FIG. 5). The driving from themotor 406M may be transmitted to the sixth drive source 406 by a speedreducer (not shown) provided in addition to the motor 406M, and thespeed reducer may be omitted. In addition, the fifth rotation axis O5may be parallel to an axis orthogonal to the fourth rotation axis O4,and the sixth rotation axis O6 may be parallel to an axis orthogonal tothe fifth rotation axis O5.

Additionally, the first inertia sensor 31 is installed at the first arm12. The first inertia sensor 31 detects the angular velocity of thefirst arm 12 around the first rotation axis O1. Although theinstallation position of the first inertia sensor 31 at the first arm 12is not particularly limited, a tip portion of the first arm 12 ispreferable. In the present embodiment, the first inertia sensor 31 isinstalled at the tip portion inside the first arm 12. Since thevibration in the first arm 12 becomes the maximum at the tip portion ofthe first arm, this can more reliably suppress the vibration in therobot 1. In addition, it should be understood that the first inertiasensor 31 may be installed at a base end portion of the first arm 12.

Additionally, a second inertia sensor 32 is installed at the second arm13. The second inertia sensor 32 detects the angular velocity of thesecond arm 13 around the second rotation axis O2. Although theinstallation position of the second inertia sensor 32 at the second arm13 is not particularly limited, a tip portion of the second arm 13 ispreferable. In the present embodiment, the second inertia sensor 32 isinstalled at the tip portion inside the second arm 13. Since thevibration in the second arm 13 becomes the maximum at the tip portion ofthe second arm, this can more reliably suppress the vibration in therobot 1. In addition, it should be understood that the second inertiasensor 32 may be installed at a base end portion of the second arm 13.

Additionally, the first inertia sensor 31 and the second inertia sensor32 are not particularly limited, respectively, and in the presentembodiment, for example, a gyroscope sensor, an acceleration sensor, orthe like can be used.

Here, in the robot 1, in order to suppress the vibration in the firstarm 12 and the second arm 13, the first inertia sensor 31 and the secondinertia sensor 32 are installed at both the first arm 12 and the secondarm 13 as mentioned above, and the operation of the drive sources 401and 402 is controlled on the basis of detection results of the firstinertia sensor 31 and the second inertia sensor 32. Accordingly, thevibration in the first arm 12 and the second arm 13 can be reliablysuppressed, and thereby, the vibration in the entire robot 1 can bereliably suppressed.

A first angle sensor 411, a second angle sensor 412, a third anglesensor 413, a fourth angle sensor 414, a fifth angle sensor 415, and asixth angle sensor 416 are provided at respective motors or speedreducers in the drive sources 401 to 406. Encoders, rotary encoders, orthe like can be used as the angle sensors. The angle sensors 411 to 416detect the rotation angles of rotating shafts of the motors or speedreducers of the drive sources 401 to 406, respectively. The motors ofthe drive sources 401 to 406 are not particularly limited, respectively.For example, it is preferable to use servo motors, such as AC servomotors or DC servo motors. Additionally, the respective cables may beinserted through the robot body 10, respectively.

As shown in FIG. 5, the robot body 10 is electrically connected to thecontrol device 20. That is, the drive sources 401 to 406, the anglesensors 411 to 416, and the inertia sensors 31 and 32 are electricallyconnected to the control device 20, respectively.

The control device 20 can independently operate the arms 12 to 15 andthe wrist 16, respectively, that is, can independently control the drivesources 401 to 406 via the motor drivers 301 to 306, respectively. Inthe case, the control device 20 performs detection by the angle sensors411 to 416, the first inertia sensor 31, and the second inertia sensor32, and controls the driving, for example, angular velocity, rotationangle, or the like of the drive sources 401 to 406 on the basis of thedetection results, respectively. A control program is stored in advancein a recording medium built in the control device 20.

As shown in FIG. 1 and FIG. 2, when the robot 1 is a verticalmulti-joint robot, the base 11 is a portion that is located on thelowermost side of the vertical multi-joint robot and is fixed to thefloor 101 of an installation space. The fixing method is notparticularly limited, and for example, in the present embodiment shownin FIGS. 1 and 2, a fixing method using a plurality of bolts 111 isused. In addition, a fixing place in the installation space of the base11 can also be the wall or ceiling of the installation space other thanthe floor.

The base 11 has a hollow base body (housing) 112. The base body 112 canbe separated into a cylindrical portion 113 that forms a cylindricalshape, and a box-shaped portion 114 that is integrally formed at anouter peripheral portion of the cylindrical portion 113 and forms a boxshape. For example, the motor 401M and the motor drivers 301 to 306 arestored in such a base body 112.

The arms 12 to 15 have a hollow arm body 2, a drive mechanism 3, and asealing unit 4, respectively. In addition, in the following, forconvenience of description, the arm body 2, the drive mechanism 3, andthe sealing unit 4 of the first arm 12 may be referred to as an “armbody 2 a”, a “drive mechanism 3 a”, and a “sealing unit 4 a”,respectively, the arm body 2, the drive mechanism 3, and the sealingunit 4 of the second arm 13 may be referred to as an “arm body 2 b”, a“drive mechanism 3 b”, and a “sealing unit 4 b”, respectively, the armbody 2, the drive mechanism 3, and the sealing unit 4 of the third arm14 may be referred to as an “arm body 2 c”, a “drive mechanism 3 c”, anda “sealing unit 4 c”, respectively, and the arm body 2, the drivemechanism 3, and the sealing unit 4 of the fourth arm 15 may be referredto as an “arm body 2 d”, a “drive mechanism 3 d”, and a “sealing unit 4d”, respectively.

Additionally, the joints 171 to 176 have rotation support mechanisms(not shown), respectively. The rotation support mechanisms are amechanism that supports one of two arms coupled to each other so as tobe rotatable to the other, a mechanism that supports one of the base 11and the first arm 12 coupled to each other so as to be rotatable to theother, and a mechanism that supports one of the fourth arm 15 and thewrist 16 coupled to each other so as to be rotatable to the other. Whenthe fourth arm 15 and the wrist 16 that are coupled to each other aretaken as an example, the rotation support mechanism can rotate the wrist16 with respect to the fourth arm 15. Additionally, each rotationsupport mechanism has a speed reducer (not shown) that reduces therotating speed of a corresponding motor in a predetermined reductionratio, and transmits the driving force thereof to a corresponding arm,the wrist body 161 of the wrist 16, and a support ring 162.

The first arm 12 is coupled to an upper end portion (tip portion) of thebase 11 in a posture in which the first arm 12 inclines with respect tothe horizontal direction. In the first arm 12, the drive mechanism 3 ahas the motor 402M, and is stored within the arm body 2 a. Additionally,the inside of the arm body 2 a is hermetically sealed by the sealingunit 4 a.

The second arm 13 is coupled to a tip portion of the first arm 12. Inthe second arm 13, the drive mechanism 3 b has the motor 403M, and isstored within the arm body 2 b. Additionally, the inside of the arm body2 b is hermetically sealed by the sealing unit 4 b.

The third arm 14 is coupled to a tip portion of the second arm 13. Inthe third arm 14, the drive mechanism 3 c has the motor 404M, and isstored within the arm body 2 c. Additionally, the inside of the arm body2 c is hermetically sealed by the sealing unit 4 c.

The fourth arm 15 is coupled to a tip portion of the third arm 14 inparallel with the direction of a central axis thereof. In the arm 15,the drive mechanism 3 d has the motors 405M and 406M, and is storedwithin the arm body 2 d. Additionally, the inside of the arm body 2 d ishermetically sealed by the sealing unit 4 d.

The wrist 16 is coupled to a tip portion (end portion opposite the base11) of the fourth arm 15. For example, a manipulator (not shown) thatgrips precision mechanical equipment, such as a wrist watch, isdetachably mounted on a tip portion (an end portion opposite the fourtharm 15) of the wrist 16. In addition, the manipulator is notparticularly limited, and includes, for example, a manipulator of aconfiguration having a plurality of fingers. The robot 1 can convey theprecision mechanical equipment by controlling the operation of the arms12 to 15, the wrist 16, or the like with the precision mechanicalequipment gripped by the manipulator.

The wrist 16 has the wrist body (sixth arm) 161 that forms a cylindricalshape, and the support ring (fifth arm) 162 that is configuredseparately from the wrist body 161, is provided at a base end portion ofthe wrist body 161, and forms a ring shape.

A tip face 163 of the wrist body 161 is a flat surface, and serves as amounting surface on which the manipulator is mounted. Additionally, thewrist body 161 is coupled to the drive mechanism 3 d of the fourth arm15 via the joint 176, and is rotated around the rotation axis O6 by thedriving of the motor 406M of the drive mechanism 3 d.

The support ring 162 is coupled to the drive mechanism 3 d of the fourtharm 15 via the joint 175, and is rotated around the rotation axis O5 ofthe entire wrist body 161 by the driving of the motor 405M of the drivemechanism 3 d.

Next, the configuration of the control device 20 will be described withreference to FIGS. 5 and 6 to 11.

As shown in FIGS. 5 and 6 to 11, the control device 20 has a first drivesource controller (first drive source control unit) (first angularvelocity command) 201 that controls the operation of the first drivesource 401, a second drive source controller (second drive sourcecontrol unit) (second angular velocity command) 202 that controls theoperation of the second drive source 402, a third drive sourcecontroller (third drive source control unit) (third angular velocitycommand) 203 that controls the operation of the third drive source 403,a fourth drive source controller (fourth drive source control unit)(fourth angular velocity command) 204 that controls the operation of thefourth drive source 404, a fifth drive source controller (fifth drivesource control unit) (fifth angular velocity command) 205 that controlsthe operation of the fifth drive source 405, and a sixth drive sourcecontroller (sixth drive source control unit) (sixth angular velocitycommand) 206 that controls the operation of the sixth drive source 406.

As shown in FIG. 6, the first drive source controller 201 has asubtractor 511, a position controller 521, a subtractor 531, an angularvelocity controller 541, a rotation angle calculator 551, an angularvelocity calculator 561, a subtractor 571, a converter 581, a correctionvalue calculator 591, and an adder 601.

As shown in FIG. 7, the second drive source controller 202 has asubtractor 512, a position controller 522, a subtractor 532, an angularvelocity controller 542, a rotation angle calculator 552, an angularvelocity calculator 562, a subtractor 572, a converter 582, a correctionvalue calculator 592, and an adder 602.

As shown in FIG. 8, the third drive source controller 203 has asubtractor 513, a position controller 523, a subtractor 533, an angularvelocity controller 543, a rotation angle calculator 553, and an angularvelocity calculator 563.

As shown in FIG. 9, the fourth drive source controller 204 has asubtractor 514, a position controller 524, a subtractor 534, an angularvelocity controller 544, a rotation angle calculator 554, and an angularvelocity calculator 564.

As shown in FIG. 10, the fifth drive source controller 205 has asubtractor 515, a position controller 525, a subtractor 535, an angularvelocity controller 545, a rotation angle calculator 555, and an angularvelocity calculator 565.

As shown in FIG. 11, the sixth drive source controller 206 has asubtractor 516, a position controller 526, a subtractor 536, an angularvelocity controller 546, a rotation angle calculator 556, and an angularvelocity calculator 566.

Here, the control device 20 calculates a target position of the wrist 16on the basis of the contents of processing to be performed by the robot1, and generates a track for moving the wrist 16 to the target position.The control device 20 measures the rotation angles of the respectivedrive sources 401 to 406 for every predetermined control cycle so thatthe wrist 16 moves along the generated track, and outputs valuescalculated on the basis of the measurement results to the drive sourcecontrollers 201 to 206 as position commands Pc of the respective drivesources 401 to 406, respectively (refer to FIGS. 6 to 11). In addition,although “values are input and output” or the like are written in theabove and the following, this means “signals corresponding to the valuesare input and output”.

As shown in FIG. 6, in addition to a position command Pc of the firstdrive source 401, detection signals are input from the first anglesensor 411 and the first inertia sensor 31, respectively, to the firstdrive source controller 201. The first drive source controller 201drives the first drive source 401 by feedback control using therespective detection signals so that a rotation angle (position feedbackvalue Pfb) of the first drive source calculated from the detectionsignal of the first angle sensor 411 becomes the position command Pc andan angular velocity feedback value δfb to be described below becomes anangular velocity command ωc to be described below.

That is, the position command Pc is input to the subtractor 511 of thefirst drive source controller 201, and the position feedback value Pfbto be described below is input from the rotation angle calculator 551.In the rotation angle calculator 551, the number of pulses input fromthe first angle sensor 411 is counted, and the rotation angle of thefirst drive source 401 according to the counted value is output to thesubtractor 511 as the position feedback value Pfb. The subtractor 511outputs a deviation (value obtained by subtracting the position feedbackvalue Pfb from a targeted value of the rotation angle of the first drivesource 401) between the position command Pc and the position feedbackvalue Pfb to the position controller 521.

The position controller 521 performs predetermined calculationprocessing using the deviation input from the subtractor 511 and aproportional gain that is a predetermined factor, and calculates thetargeted value of the angular velocity of the first drive source 401according to the deviation. The position controller 521 outputs a signalshowing the targeted value (command value) of the angular velocity ofthe first drive source 401 to the subtractor 531 as the angular velocitycommand (first angular velocity command) ωc. In addition, in the presentembodiment, a proportional control (P control) is performed as thefeedback control. However, the feedback control is not limited to this.

The angular velocity command ωc and the angular velocity feedback valueωfb to be described below are input to the subtractor 531. Thesubtractor 531 outputs a deviation (value obtained by subtracting theangular velocity feedback value ωfb from the targeted value of theangular velocity of the first drive source 401) between the angularvelocity command ωc and the angular velocity feedback value ωfb to theangular velocity controller 541.

The angular velocity controller 541 performs predetermined calculationprocessing including integration, using the deviation input from thesubtractor 531, a proportional gain that is a predetermined factor, anintegration gain, or the like, thereby generating a driving signal(driving current) of the first drive source 401 according to thedeviation and supplying the driving signal to the motor 401M via themotor driver 301. In addition, in the present embodiment, the PI(proportion/integration) control is performed as the feedback control.However, the feedback control is not limited to this.

In this way, the feedback control is performed and the driving currentof the first drive source 401 is controlled so that the positionfeedback value Pfb is as equal to the position command Pc as possibleand the angular velocity feedback value ωfb is as equal to the angularvelocity command We as possible.

Next, the angular velocity feedback value ωfb in the first drive sourcecontroller 201 will be described.

In the angular velocity calculator 561, an angular velocity ωm1 of thefirst drive source 401 is calculated on the basis of the frequency of apulse signal input from the first angle sensor 411, and the angularvelocity ωm1 is output to the adder 601.

Additionally, in the angular velocity calculator 561, an angularvelocity ωA1 m of the first arm 12 around the rotation axis O1 iscalculated on the basis of the frequency of the pulse signal input fromthe first angle sensor 411, and the angular velocity ωA1 m is output tothe subtractor 571. In addition, the angular velocity ωA1 m is a valueobtained by dividing the angular velocity ωm1 by a reduction ratiobetween the motor 401M of the first drive source 401 and the first arm12, that is, in the joint 171.

Additionally, the angular velocity of the first arm 12 around therotation axis O1 is detected by the first inertia sensor 31. A detectionsignal of the first inertia sensor 31, that is, an angular velocity ωA1of the first arm 12 around the rotation axis O1 detected by the firstinertia sensor 31 is output to the subtractor 571.

The angular velocity ωA1 and the angular velocity ωA1 m are input to thesubtractor 571, and the subtractor 571 outputs a value ωA1 s (=ωA1−ωA1m) obtained by subtracting the angular velocity ωA1 m from the angularvelocity ωA1 to the converter 581. The value ωA1 s is equivalent to avibration component (vibration angular velocity) of the angular velocityof the first arm 12 around the rotation axis O1. Hereinafter, ωA1 s isreferred to as a vibration angular velocity. In the present embodiment,feedback control is performed in which the vibration angular velocityωA1 s (in detail, an angular velocity ωm1 s in the motor 401M that is avalue generated on the basis of the vibration angular velocity ωA1 s) ismultiplied by a gain Kato be described below and is returned to theinput side of the drive source 401. Specifically, feedback control isperformed on the drive source 401 so that the vibration angular velocityωA1 s becomes as close to zero as possible. Accordingly, the vibrationin the robot 1 can be suppressed. In addition, the angular velocity ofthe drive source 401 is controlled in the feedback control.

The converter 581 converts the vibration angular velocity ωA1 s into theangular velocity ωm1 s in the first drive source 401, and outputs theangular velocity ωm1 s to the correction value calculator 591. Thisconversion can be obtained by multiplying the vibration angular velocityωA1 s by the reduction ratio between the motor 401M of the first drivesource 401 and the first arm 12, that is, in the joint 171.

The correction value calculator 591 multiplies the angular velocity ωm1s by a gain (feedback gain) Ka that is a predetermined factor, obtains acorrection value (first correction component) Ka·ωm1 s, and outputs thecorrection value Ka·ωm1 s to the adder 601.

The angular velocity ωm1 and the correction value Ka·ωm1 s are input tothe adder 601. The adder 601 outputs an additional value of the angularvelocity ωm1 and the correction value Ka·ωm1 s to the subtractor 531 asthe angular velocity feedback value ωfb. In addition, the subsequentoperation is as mentioned above.

As shown in FIG. 7, in addition to a position command Pc of the seconddrive source 402, detection signals are input from the second anglesensor 412 and the second inertia sensor 32, respectively, to the seconddrive source controller 202. The second drive source controller 202drives the second drive source 402 by feedback control using therespective detection signals so that a rotation angle (position feedbackvalue Pfb) of the second drive source 402 calculated from the detectionsignal of the second angle sensor 412 becomes the position command Pcand an angular velocity feedback value ωfb to be described below becomesan angular velocity command ωc.

That is, the position command Pc is input to the subtractor 512 of thesecond drive source controller 202, and the position feedback value Pfbto be described below is input from the rotation angle calculator 552.In the rotation angle calculator 552, the number of pulses input fromthe second angle sensor 412 is counted, and the rotation angle of thesecond drive source 402 according to the counted value is output to thesubtractor 512 as the position feedback value Pfb. The subtractor 512outputs a deviation (value obtained by subtracting the position feedbackvalue Pfb from a targeted value of the rotation angle of the seconddrive source 402) between the position command Pc and the positionfeedback value Pfb to the position controller 522.

The position controller 522 performs predetermined calculationprocessing using the deviation input from the subtractor 512 and aproportional gain that is a predetermined factor, and calculates thetargeted value of the angular velocity of the second drive source 402according to the deviation. The position controller 522 outputs a signalshowing the targeted value (command value) of the angular velocity ofthe second drive source 402 to the subtractor 532 as the angularvelocity command (second angular velocity command) ωc. In addition, inthe present embodiment, a proportional control (P control) is performedas the feedback control. However, the feedback control is not limited tothis.

The angular velocity command ωc and the angular velocity feedback valueωfb to be described below are input to the subtractor 532. Thesubtractor 532 outputs a deviation (value obtained by subtracting theangular velocity feedback value ωfb from the targeted value of theangular velocity of the second drive source 402) between the angularvelocity command ωc and the angular velocity feedback value ωfb to theangular velocity controller 542.

The angular velocity controller 542 performs predetermined calculationprocessing including integration, using the deviation input from thesubtractor 532, a proportional gain that is a predetermined factor, anintegration gain, or the like, thereby generating a driving signal(driving current) of the second drive source 402 according to thedeviation and supplying the driving signal to the motor 402M via themotor driver 302. In addition, in the present embodiment, the PI controlis performed as the feedback control. However, the feedback control isnot limited to this.

In this way, the feedback control is performed and the driving currentof the second drive source 402 is controlled so that the positionfeedback value Pfb is as equal to the position command Pc as possibleand the angular velocity feedback value ωfb is as equal to the angularvelocity command ωc as possible. In addition, since the rotation axis O2is orthogonal to the rotation axis O1, the rotation axis is notinfluenced by the operation or vibration of the first arm 12, and theoperation of the second drive source 402 can be controlled independentlyfrom the first drive source 401.

Next, the angular velocity feedback value ωfb in the second drive sourcecontroller 202 will be described.

In the angular velocity calculator 562, an angular velocity ωm2 of thesecond drive source 402 is calculated on the basis of the frequency of apulse signal input from the second angle sensor 412, and the angularvelocity ωm2 is output to the adder 602.

Additionally, in the angular velocity calculator 562, an angularvelocity ωA2 m of the second arm 13 around the rotation axis O2 iscalculated on the basis of the frequency of the pulse signal input fromthe second angle sensor 412, and the angular velocity ωA2 m is output tothe subtractor 572. In addition, the angular velocity ωA2 m is a valueobtained by dividing the angular velocity ωm2 by a reduction ratiobetween the motor 402M of the second drive source 402 and the second arm13, that is, in the joint 172.

Additionally, the angular velocity of the second arm 13 around therotation axis O2 is detected by the second inertia sensor 32. Adetection signal of the second inertia sensor 32, that is, an angularvelocity ωA2 of the second arm 13 around the rotation axis O2 detectedby the second inertia sensor 32 is output to the subtractor 572. Inaddition, since the rotation axis O2 is orthogonal to the rotation axisO1, the angular velocity of the second arm 13 around the rotation axisO2 can be easily and reliably obtained without being influenced by theoperation or vibration of the first arm 12.

The angular velocity ωA2 and the angular velocity ωA2 m are input to thesubtractor 572, and the subtractor 572 outputs a value ωA2 s (=ωA2−ωA2m) obtained by subtracting the angular velocity ωA2 m from the angularvelocity ωA2 to the converter 582. The value ωA2 s is equivalent to avibration component (vibration angular velocity) of the angular velocityof the second arm 13 around the rotation axis O2. Hereinafter, ωA2 s isreferred to as a vibration angular velocity. In the present embodiment,feedback control is performed in which the vibration angular velocityωA2 s (in detail, an angular velocity ωm2 s in the motor 402M that is avalue generated on the basis of the vibration angular velocity ωA2 s) ismultiplied by a gain Ka to be described below and is returned to theinput side of the second drive source 402. Specifically, feedbackcontrol is performed on the second drive source 402 so that thevibration angular velocity ωA2 s becomes as close to zero as possible.Accordingly, the vibration in the robot 1 can be suppressed. Inaddition, the angular velocity of the second drive source 402 iscontrolled in the feedback control.

The converter 582 converts the vibration angular velocity ωA2 s into theangular velocity ωm2 s in the second drive source 402, and outputs theangular velocity ωm2 s to the correction value calculator 592. Thisconversion can be obtained by multiplying the vibration angular velocityωA2 s by the reduction ratio between the motor 402M of the second drivesource 402 and the second arm 13, that is, in the joint 172.

The correction value calculator 592 multiplies the angular velocity ωm2s by a gain (feedback gain) Ka that is a predetermined factor, obtains acorrection value (second correction component) Ka·ωm2 s, and outputs thecorrection value Ka·ωm2 s to the adder 602. In addition, the gain Ka inthe second drive source controller 202 and the gain Ka in the firstdrive source controller 201 may be the same or may be different.

The angular velocity ωm2 and the correction value Ka·ωm2 s are input tothe adder 602. The adder 602 outputs an additional value of the angularvelocity ωm2 and the correction value Ka·ωm2 s to the subtractor 532 asthe angular velocity feedback value ωfb. In addition, the subsequentoperation is as mentioned above.

As shown in FIG. 8, in addition to a position command Pc of the thirddrive source 403, a detection signal is input from the third anglesensor 413 to the third drive source controller 203. The third drivesource controller 203 drives the third drive source 403 by feedbackcontrol using the respective detection signals so that a rotation angle(position feedback value Pfb) of the third drive source 403 calculatedfrom the detection signal of the third angle sensor 413 becomes theposition command Pc and an angular velocity feedback value ωfb to bedescribed below becomes an angular velocity command ωc.

That is, the position command Pc is input to the subtractor 513 of thethird drive source controller 203, and the position feedback value Pfbto be described below is input from the rotation angle calculator 553.In the rotation angle calculator 553, the number of pulses input fromthe third angle sensor 413 is counted, and the rotation angle of thethird drive source 403 according to the counted value is output to thesubtractor 513 as the position feedback value Pfb. The subtractor 513outputs a deviation (value obtained by subtracting the position feedbackvalue Pfb from a targeted value of the rotation angle of the third drivesource 403) between the position command Pc and the position feedbackvalue Pfb to the position controller 523.

The position controller 523 performs predetermined calculationprocessing using the deviation input from the subtractor 512, aproportional gain that is a predetermined factor, and the like andcalculates the targeted value of the angular velocity of the third drivesource 403 according to the deviation. The position controller 522outputs a signal showing the targeted value (command value) of theangular velocity of the third drive source 403 to the subtractor 533 asthe angular velocity command ωc. In addition, in the present embodiment,a proportional control (P control) is performed as the feedback control.However, the feedback control is not limited to this.

Additionally, in the angular velocity calculator 563, the angularvelocity of the third drive source 403 is calculated on the basis of thefrequency of a pulse signal input from the third angle sensor 413, andthe angular velocity is output to the subtractor 533 as the angularvelocity feedback value ωfb.

The angular velocity command ωc and the angular velocity feedback valueωfb are input to the subtractor 533. The subtractor 533 outputs adeviation (value obtained by subtracting the angular velocity feedbackvalue ωfb from the targeted value of the angular velocity of the thirddrive source 403) between the angular velocity command ωc and theangular velocity feedback value ωfb to the angular velocity controller543.

The angular velocity controller 543 performs predetermined calculationprocessing including integration, using the deviation input from thesubtractor 533, a proportional gain that is a predetermined factor, anintegration gain, or the like, thereby generating a driving signal(driving current) of the third drive source 403 according to thedeviation and supplying the driving signal to the motor 403M via themotor driver 303. In addition, in the present embodiment, the PI controlis performed as the feedback control. However, the feedback control isnot limited to this.

In this way, the feedback control is performed and the driving currentof the third drive source 403 is controlled so that the positionfeedback value Pfb is as equal to the position command Pc as possibleand the angular velocity feedback value ωfb is as equal to the angularvelocity command ωc as possible.

In addition, since the drive source controllers 204 to 206 are the sameas the third drive source controller 203, respectively, the descriptionthereof is omitted.

As described above, according to the robot 1, the vibration in the robot1 can be easily and reliably suppressed.

First, in the control of the robot 1, a huge calculation is unnecessary,and thereby, the response speed in the control of the robot 1 can beincreased, and the configuration of the control device 20 can besimplified.

Additionally, in the control of the robot 1, a calculation in which asingular point is present is unnecessary. Thus, the control of the robot1 can be reliably performed, and thereby, vibration can be reliablysuppressed.

Additionally, since the inertia sensors 31 and 32 are installed at thefirst arm 12 and the second arm 13, respectively, and the first rotationaxis O1 for the rotation of the first arm 12 and the second rotationaxis O2 for the rotation of the second arm 13 are made orthogonal toeach other, the angular velocities of the respective arms can bedetected as simple rotational components in which these velocities arenot mixed. Hence, since control is performed by the calculation usingthese velocities, the vibration in the robot 1 can be more easily,accurately, and reliably suppressed.

In addition, since the first rotation axis O1 for the rotation of thefirst arm 12 and the second rotation axis O2 for the rotation of thesecond arm 13 are made orthogonal to each other, the angular velocitiesof the respective arms can be detected as simple rotational componentsin which these velocities are not mixed. Since the rotational componentswith no mixture of these velocities are multiplied by feedback gains,respectively, the respective rotational components can be corrected withhigh precision.

Second Embodiment

FIG. 12 is a schematic view showing a second embodiment of a robot. FIG.13 is a block diagram of portions of the robot shown in FIG. 12.

In addition, in the following, for convenience of description, the upperside in FIG. 12 is referred to as “upper” and “upside” and the lowerside is referred to as “lower” and “downside”. Additionally, the baseside in FIG. 12 is referred to as a “base end”, and the opposite side isreferred to as a “tip”. Additionally, the rotation axes O2 and O3 areshown in an exaggerated manner in FIG. 12, respectively. Additionally,inertia sensors 31, 32, and 33 are shown outside arms 12, 13, 14 in FIG.12, respectively, in order to clarify the presence of the sensors.

The second embodiment will be described below mainly regarding thedifferences from the aforementioned first embodiment, and thedescription of the same matters will be omitted.

As shown in FIG. 12, in the robot 1 of the second embodiment, the thirdinertia sensor 33 is installed at the third arm 14. The third inertiasensor 33 detects the angular velocity of the third arm 14 around therotation axis O2. Although the installation position of the thirdinertia sensor 33 at the third arm 14 is not particularly limited, a tipportion of the third arm 14 is preferable. In the present embodiment,the third inertia sensor 33 is installed at the tip portion inside thethird arm 14. Since the vibration in the third arm 14 becomes themaximum at the tip portion of the third arm 14, this can more reliablysuppress the vibration in the robot 1. In addition, it should beunderstood that the third inertia sensor 33 may be installed at a baseend portion of the third arm 14.

Additionally, the third inertia sensor 33 is not particularly limited,and in the present embodiment, for example, a gyroscope sensor, anacceleration sensor, or the like can be used.

In the robot 1, in order to suppress the vibration in the first arm 12,the second arm 13, and the third arm 14, the first inertia sensor 31,the second inertia sensor 32, and the third inertia sensor 33 areinstalled at all the first arm 12, the second arm 13, and the third arm14 as mentioned above, and the operation of the first drive source 401,the second drive source 402, and the third drive source 403 iscontrolled on the basis of detection results of the first inertia sensor31, the second inertia sensor 32, and the third inertia sensor 33.Accordingly, the vibration in the first arm 12, the second arm 13, andthe third arm 14 can be reliably suppressed, and thereby, the vibrationin the entire robot 1 can be reliably suppressed.

Additionally, in the robot 1, the third drive source controller 203 ofthe control device 20 is different from that of the first embodiment.The third drive source controller 203 will be described below.

As shown in FIG. 13, the third drive source controller 203 has asubtractor 518, a position controller 528, a subtractor 538, an angularvelocity controller 548, a rotation angle calculator 558, an angularvelocity calculator 568, an adder-subtractor 618, a converter 588, acorrection value calculator 598, and an adder 608. In addition to aposition command Pc of the third drive source 403, detection signals areinput from the third angle sensor 413, the second inertia sensor 32, andthe third inertia sensor 33, respectively, to the third drive sourcecontroller 203. The third drive source controller 203 drives the thirddrive source 403 by feedback control using the respective detectionsignals so that a rotation angle (position feedback value Pfb) of thethird drive source 403 calculated from the detection signal of the thirdangle sensor 413 becomes the position command Pc and an angular velocityfeedback value ωfb to be described below becomes an angular velocitycommand ωc.

That is, the position command Pc is input to the subtractor 518 of thethird drive source controller 203, and the position feedback value Pfbto be described below is input from the rotation angle calculator 558.In the rotation angle calculator 558, the number of pulses input fromthe third angle sensor 413 is counted, and the rotation angle of thethird drive source 403 according to the counted value is output to thesubtractor 518 as the position feedback value Pfb. The subtractor 518outputs a deviation (value obtained by subtracting the position feedbackvalue Pfb from a targeted value of the rotation angle of the third drivesource 403) between the position command Pc and the position feedbackvalue Pfb to the position controller 528.

The position controller 528 performs predetermined calculationprocessing using the deviation input from the subtractor 518, aproportional gain that is a predetermined factor, and the like andcalculates the targeted value of the angular velocity of the third drivesource 403 according to the deviation. The position controller 528outputs a signal showing the targeted value (command value) of theangular velocity of the third drive source 403 to the subtractor 538 asthe angular velocity command (third angular velocity command) ωc. Inaddition, in the present embodiment, a proportional control (P control)is performed as the feedback control. However, the feedback control isnot limited to this.

The angular velocity command ωc and the angular velocity feedback valueωfb to be described below are input to the subtractor 538. Thesubtractor 538 outputs a deviation (value obtained by subtracting theangular velocity feedback value ωfb from the targeted value of theangular velocity of the third drive source 403) between the angularvelocity command ωc and the angular velocity feedback value ωfb to theangular velocity controller 548.

The angular velocity controller 548 performs predetermined calculationprocessing including integration, using the deviation input from thesubtractor 538, a proportional gain that is a predetermined factor, anintegration gain, or the like, thereby generating a driving signal(driving current) of the third drive source 403 according to thedeviation and supplying the driving signal to the motor of the thirddrive source 403 via the motor driver 303. In addition, in the presentembodiment, the PI control is performed as the feedback control.However, the feedback control is not limited to this.

In this way, the feedback control is performed and the driving currentof the third drive source 403 is controlled so that the positionfeedback value Pfb is as equal to the position command Pc as possibleand the angular velocity feedback value ωfb is as equal to the angularvelocity command ωc as possible. In addition, since the rotation axis O3is orthogonal to the rotation axis O1, the rotation axis is notinfluenced by the operation or vibration of the first arm 12, and theoperation of the third drive source 403 can be controlled independentlyfrom the first drive source 401.

Next, the angular velocity feedback value ωfb in the third drive sourcecontroller 203 will be described.

In the angular velocity calculator 568, an angular velocity ωm3 of thethird drive source 403 is calculated on the basis of the frequency of apulse signal input from the third angle sensor 413, and the angularvelocity ωm3 is output to the adder 608.

Additionally, in the angular velocity calculator 568, an angularvelocity ωA3 m of the third arm 14 around the rotation axis O3 iscalculated on the basis of the frequency of the pulse signal input fromthe third angle sensor 413, and the angular velocity ωA3 m is output tothe adder-subtractor 618. In addition, the angular velocity ωA3 m is avalue obtained by dividing the angular velocity ωm3 by a reduction ratiobetween the motor 403M of the third drive source 403 and the third arm14, that is, in the joint 173.

Additionally, the angular velocity of the third arm 14 around therotation axis O2 is detected by the third inertia sensor 33. A detectionsignal of the third inertia sensor 33, that is, an angular velocity ωA3of the third arm 14 around the rotation axis O2 detected by the thirdinertia sensor 33 is output to the adder-subtractor 618. In addition,since the rotation axes O2 and O3 are orthogonal to the rotation axisO1, respectively, the angular velocity of the third arm 14 around therotation axis O2 can be easily and reliably obtained without beinginfluenced by the operation or vibration of the first arm 12.

Additionally, the detection signal of the aforementioned second inertiasensor 32, that is, the angular velocity ωA2 of the second arm 13 aroundthe rotation axis O2 detected by the second inertia sensor 32 is outputto the adder-subtractor 618.

The angular velocity ωA3, the angular velocity ωA2, and the angularvelocity ωA3 m are input to the adder-subtractor 618, and theadder-subtractor 618 outputs a value ωA3 s (=ωA3−ωA2−ωA3 m) obtained bysubtracting the angular velocity ωA2 and the angular velocity ωA3 m fromthe angular velocity ωA3 to the converter 588. The value ωA3 s isequivalent to a vibration component (vibration angular velocity) of theangular velocity of the third arm 14 around the rotation axis O3.Hereinafter, ωA3 s is referred to as a vibration angular velocity. Inthe present embodiment, feedback control is performed in which thevibration angular velocity ωA3 s (in detail, an angular velocity ωm3 sin the motor 403M that is a value generated on the basis of thevibration angular velocity ωA3 s) is multiplied by a gain Ka to bedescribed below and is returned to the input side of the third drivesource 403. Specifically, feedback control is performed on the thirddrive source 403 so that the vibration angular velocity ωA3 s becomes asclose to zero as possible. Accordingly, the vibration in the robot 1 canbe suppressed. In addition, the angular velocity of the third drivesource 403 is controlled in the feedback control.

The converter 588 converts the vibration angular velocity ωA3 s into theangular velocity ωm3 s in the third drive source 403, and outputs theangular velocity ωm3 s to the correction value calculator 598. Thisconversion can be obtained by multiplying the vibration angular velocityωA3 s by the reduction ratio between the motor 403M of the third drivesource 403 and the third arm 14, that is, in the joint 173.

The correction value calculator 598 multiplies the angular velocity ωm3s by a gain (feedback gain) Ka that is a predetermined factor, obtains acorrection value (third correction component) Ka·ωm3 s, and outputs thecorrection value Ka·ωm3 s to the adder 608. In addition, the gain Ka inthe third drive source controller 203, the gain Ka in the first drivesource controller 201, and the gain Ka in the second drive sourcecontroller 202 may be the same or may be different, respectively.

The angular velocity ωm3 and the correction value Ka·ωm3 s are input tothe adder 608. The adder 608 outputs an additional value of the angularvelocity ωm3 and the correction value Ka·ωm3 s to the subtractor 538 asthe angular velocity feedback value ωfb. In addition, the subsequentoperation is the same as that of the first embodiment.

According to the robot 1, the same effects as the aforementioned firstembodiment are obtained.

In this robot 1, since the control of suppressing vibration is alsoperformed on the third arm 14, the vibration in the robot 1 can be morereliably suppressed.

Additionally, since the inertia sensors 31, 32, and 33 are installed atthe first arm 12, the second arm 13, and the third arm 14, respectively,and the first rotation axis O1 for the rotation of the first arm 12 andthe second rotation axis O2 for the rotation of the second arm 13 aremade orthogonal to each other, the second rotation axis O2 for therotation of the second arm 13 and the third rotation axis O3 for therotation of the third arm 14 are made parallel to each other, theangular velocities of the respective arms can be detected as simplerotational components in which these velocities are not mixed. Hence,since control is performed by the calculation using these velocities,the vibration in the robot 1 can be more easily, accurately, andreliably suppressed.

Third Embodiment

FIG. 14 is a block diagram showing portions of a third embodiment of arobot.

The third embodiment will be described below mainly regardingdifferences from the aforementioned second embodiment, and thedescription of the same matters will be omitted.

As shown in FIG. 14, in the robot 1 of the third embodiment, the seconddrive source controller 202 of the control device 20 is different fromthat of the second embodiment. The second drive source controller 202will be described below.

As shown in FIG. 14, the second drive source controller 202 has anadder-subtractor 629 instead of the subtractor 577. In addition to aposition command Pc of the second drive source 402, detection signalsare input from the second angle sensor 412 and the third inertia sensor33, respectively, to the second drive source controller 202.Additionally, an angular velocity ωA3 m of the third arm 14 around therotation axis O3 is input from the third drive source controller 203 tothe second drive source controller 202. The second drive sourcecontroller 202 drives the second drive source 402 by feedback controlusing the respective detection signals so that a rotation angle(position feedback value Pfb) of the second drive source 402 calculatedfrom the detection signal of the second angle sensor 412 becomes theposition command Pc and an angular velocity feedback value ωfb to bedescribed below becomes an angular velocity command ωc.

That is, the position command Pc is input to the subtractor 519 of thesecond drive source controller 202, and the position feedback value Pfbto be described below is input from the rotation angle calculator 559.In the rotation angle calculator 559, the number of pulses input fromthe second angle sensor 412 is counted, and the rotation angle of thesecond drive source 402 according to the counted value is output to thesubtractor 519 as the position feedback value Pfb. The subtractor 519outputs a deviation (value obtained by subtracting the position feedbackvalue Pfb from a targeted value of the rotation angle of the seconddrive source 402) between the position command Pc and the positionfeedback value Pfb to the position controller 529.

The position controller 529 performs predetermined calculationprocessing using the deviation input from the subtractor 519 and aproportional gain that is a predetermined factor, and calculates thetargeted value of the angular velocity of the second drive source 402according to the deviation. The position controller 529 outputs a signalshowing the targeted value (command value) of the angular velocity ofthe second drive source 402 to the subtractor 539 as the angularvelocity command (second angular velocity command) ωc. In addition, inthe present embodiment, a proportional control (P control) is performedas the feedback control. However, the feedback control is not limited tothis.

The angular velocity command ωc and the angular velocity feedback valueωfb to be described below are input to the subtractor 539. Thesubtractor 539 outputs a deviation (value obtained by subtracting theangular velocity feedback value ωfb from the targeted value of theangular velocity of the second drive source 402) between the angularvelocity command ωc and the angular velocity feedback value ωfb to theangular velocity controller 549.

The angular velocity controller 549 performs predetermined calculationprocessing including integration, using the deviation input from thesubtractor 539, a proportional gain that is a predetermined factor, anintegration gain, or the like, thereby generating a driving signal(driving current) of the second drive source 402 according to thedeviation and supplying the driving signal to the motor 402M via themotor driver 302. In addition, in the present embodiment, the PI controlis performed as the feedback control. However, the feedback control isnot limited to this.

In this way, the feedback control is performed and the driving currentof the second drive source 402 is controlled so that the positionfeedback value Pfb is as equal to the position command Pc as possibleand the angular velocity feedback value ωfb is as equal to the angularvelocity command ωc as possible.

Next, the angular velocity feedback value ωfb in the second drive sourcecontroller 202 will be described.

In the angular velocity calculator 569, an angular velocity ωm2 of thesecond drive source 402 is calculated on the basis of the frequency of apulse signal input from the second angle sensor 412, and the angularvelocity ωm2 is output to the adder 609.

Additionally, in the angular velocity calculator 569, the angularvelocity ωA2 m of the second arm 13 around the rotation axis O2 iscalculated on the basis of the frequency of the pulse signal input fromthe second angle sensor 412, and the angular velocity ωA2 m is output tothe adder-subtractor 629. In addition, the angular velocity ωA2 m is avalue obtained by dividing the angular velocity ωm2 by a reduction ratiobetween the motor 402M of the second drive source 402 and the second arm13, that is, in the joint 172.

Additionally, the angular velocity ωA3 m of the third arm 14 around therotation axis O3 is output from the angular velocity calculator 5610 ofthe aforementioned third drive source controller 203 to theadder-subtractor 629.

Additionally, the detection signal of the aforementioned third inertiasensor 33, that is, the angular velocity ωA3 of the third arm 14 aroundthe rotation axis O2 detected by the third inertia sensor 33 is outputto the adder-subtractor 629 and an adder-subtractor 6110.

The angular velocity ωA3, the angular velocity ωA2 m, and the angularvelocity ωA3 m are input to the adder-subtractor 629, and theadder-subtractor 629 outputs a value ωA2 s (=ωA3−ωA2 m−ωA3 m) obtainedby subtracting the angular velocity ωA2 m and the angular velocity ωA3 mfrom the angular velocity ωA3 to the converter 589. The value ωA2 s isequivalent to a vibration component (vibration angular velocity) of thetotal angular velocity of the second arm 13 and the third arm 14 aroundthe rotation axis O2. Hereinafter, ωA2 s is referred to as a vibrationangular velocity. In the present embodiment, feedback control isperformed in which the vibration angular velocity ωA2 s (in detail, anangular velocity ωm2 s in the motor 402M that is a value generated onthe basis of the vibration angular velocity ωA2 s) is multiplied by again Ka to be described below and is returned to the input side of thesecond drive source 402. Specifically, feedback control is performed onthe second drive source 402 so that the vibration angular velocity ωA2 sbecomes as close to zero as possible. Accordingly, the vibration in therobot 1 can be suppressed. In addition, the angular velocity of thesecond drive source 402 is controlled in the feedback control.

The converter 589 converts the vibration angular velocity ωA2 s into theangular velocity ωm2 s in the second drive source 402, and outputs theangular velocity ωm2 s to the correction value calculator 599. Thisconversion can be obtained by multiplying the vibration angular velocityωA2 s by the reduction ratio between the motor 402M of the second drivesource 402 and the second arm 13, that is, in the joint 172.

The correction value calculator 599 multiplies the angular velocity ωm2s by a gain (feedback gain) Ka that is a predetermined factor, obtains acorrection value (second correction component) Ka·ωm2 s, and outputs thecorrection value Ka·ωm2 s to the adder 609. In addition, the gain Ka inthe second drive source controller 202, the gain Ka in the first drivesource controller 201, and the gain Ka in the third drive sourcecontroller 203 may be the same or may be different, respectively.

The angular velocity ωm2 and the correction value Ka·ωm2 s are input tothe adder 609. The adder 609 outputs an additional value of the angularvelocity ωm2 and the correction value Ka·ωm2 s to the subtractor 539 asthe angular velocity feedback value ωfb. In addition, the subsequentoperation is the same as the second embodiment.

According to the robot 1, the same effects as the aforementioned secondembodiment are obtained.

In the robot 1, since the control of suppressing vibration is performedon the second drive source 402 that drives the second arm 13, using thedetection result of the third inertia sensor 33 installed at the thirdarm 14 on the tip side where a larger vibration than the second arm 13is generated, the effect of suppressing the vibration in the robot 1 canbe enhanced.

In detail, since the second drive source controller 202 performs thecontrol of suppressing vibration on the second drive source 402 thatcontrols the operation of the second drive source 402, that is, rotatesthe second arm 13 by the angular velocities ωA3, ωA2 m, and ωA3 m, usingthe detection result of the third inertia sensor 33 installed at thethird arm 13 where a larger vibration than the second arm 13 isgenerated, the effect of suppressing the vibration can be enhanced.

Fourth Embodiment

FIG. 15 is a schematic view showing a fourth embodiment of a robot. FIG.16 is a block diagram of portions of the robot shown in FIG. 15.

In addition, in the following, for convenience of description, the upperside in FIG. 15 is referred to as “upper” and “upside” and the lowerside is referred to as “lower” and “downside”. Additionally, the baseside in FIG. 15 is referred to as a “base end”, and the opposite side isreferred to as a “tip”. Additionally, the rotation axes O2 and O3 areshown in an exaggerated manner in FIG. 15, respectively. Additionally,inertia sensors 31, 32, and 33 are shown outside arms 12, 13, 14 in FIG.15, respectively, in order to clarify the presence of the sensors.

The fourth embodiment will be described below mainly regardingdifferences from the aforementioned second and third embodiments, andthe description of the same matters will be omitted.

The robot 1 of the fourth embodiment has an angle detection unit thatdetects an angle θ (hereinafter simply referred to as an “angle θ”)formed between an axis (central axis) 131 of the second arm 13 and anaxis 141 of the third arm 14 (to refer to FIG. 15). In the presentembodiment, the angle detection unit is constituted by the third anglesensor 413 and the control device 20. That is, a rotation anglecalculator 5512 of the third drive source controller 203 of the controldevice 20 counts the number of pulses input from the third angle sensor413, obtains the rotation angle of the third drive source 403 accordingto the counted value, and thereby, obtains the angle θ.

Additionally, as shown in FIG. 16, in the robot 1 of the fourthembodiment, the second drive source controller 202 of the control device20 is different from that of the second embodiment and the thirdembodiment. The second drive source controller 202 will be describedbelow.

As shown in FIG. 16, the second drive source controller 202 has switches63 and 64. The switch 63 selects any one of an angular velocity ωA2 andan angular velocity ωA3, and outputs the selected angular velocity to anadder-subtractor 6211. Additionally, the switch 64 switches between acase where an angular velocity ωA3 m is output to the adder-subtractor6211 and a case where the angular velocity ωA3 m is not output to theadder-subtractor 6211.

In the robot 1, the second drive source controller 202 detects the angleθ using the third angle sensor 413 as mentioned above, and selects,according to the detected angle θ, a case where the switches 63 and 64are switched so that the angular velocity ωA3, an angular velocity ωA2m, and the angular velocity ωA3 m are input to the adder-subtractor 6211and a case where the switches 63 and 64 are switched so that the angularvelocity ωA2 and the angular velocity ωA2 m are input.

That is, when the angle θ is equal to or larger than a first thresholdand equal to or smaller than a second threshold that is larger than thefirst threshold, the third arm 14 is in a state (hereinafter simplyreferred to as an “extended state” or an “extended posture”) where thethird arm 14 is extended or slightly curved with respect to the secondarm 13. In this case, the second drive source controller 202 switchesthe switches 63 and 64 so that the angular velocity ωA3, the angularvelocity ωA2 m, and the angular velocity ωA3 m are input to theadder-subtractor 6211. In this case, the control of the second drivesource 402 of the second drive source controller 202 is the same as thatof the third embodiment.

Additionally, when the angle θ is smaller than the first threshold andlarger than the second threshold, the third arm 14 is in a state(hereinafter simply referred to as a “folded state” or a “foldedposture”) where the third arm 14 is largely curved with respect to thefourth arm 13. In this case, the second drive source controller 202switches the switches 63 and 64 so that the angular velocity ωA2 and theangular velocity ωA2 m are input to the adder-subtractor 6211. In thiscase, the control of the second drive source 402 of the second drivesource controller 202 is the same as that of the second embodiment.

Accordingly, the compatibility between enhancing the effect ofsuppressing vibration and the stability of control can be achieved.

That is, when the third arm 14 is in the extended posture, compared tothe case of the folded posture, the control of the robot 1 is stable,but the inertia moment of the robot 1 is large and the vibration in therobot is large. Thus, the effect of suppressing vibration can beenhanced by controlling the second drive source 402 similar to the thirdembodiment, using a detection result of the third inertia sensor 33installed at the third arm 14 on the tip side of the second arm 13 wherea larger vibration than the second arm 13 is generated.

On the other hand, when the third arm 14 is in the folded posture,compared to the case of the extended posture, the inertia moment of therobot 1 is small and the vibration in the robot is small but controltends to become unstable and the robot 1 vibrates easily. Thus, thevibration in the robot 1 can be prevented and control can be stabilizedby controlling the second drive source 402 similar to the secondembodiment, using a detection result of the second inertia sensor 32installed at the second arm. 13 on the base end side of the third arm 14where a smaller vibration than the third arm 14 is generated.

Here, although the first threshold is not particularly limited and isappropriately set according to terms and conditions, the first thresholdis preferably set within a range of 45° to 135° and is more preferablyset within a range of 70° to 110°. As one example, the first thresholdis set to 90°, for example. Additionally, although the second thresholdis not particularly limited and is appropriately set according to termsand conditions, the second threshold is preferably set within a range of225° to 315° and is more preferably set within a range of 250° to 290°.As one example, the second threshold is set to 270°, for example.Accordingly, the compatibility between enhancing the effect ofsuppressing vibration and the stability of control can be more reliablyachieved.

Hereinafter, an angular velocity feedback value ωfb in the second drivesource controller 202 will be specifically described.

In an angular velocity calculator 5611, an angular velocity ωm2 of thesecond drive source 402 is calculated on the basis of the frequency of apulse signal input from the second angle sensor 412, and the angularvelocity ωm2 is output to an adder 6011.

Additionally, in the angular velocity calculator 5611, the angularvelocity ωA2 m of the second arm 13 around the rotation axis O2 iscalculated on the basis of the frequency of the pulse signal input fromthe second angle sensor 412, and the angular velocity ωA2 m is output tothe adder-subtractor 6211. In addition, the angular velocity ωA2 m is avalue obtained by dividing the angular velocity ωm2 by a reduction ratiobetween the motor 402M of the second drive source 402 and the second arm13, that is, in the joint 172.

When the angle θ is equal to or larger than the first threshold and isequal to or smaller than the second threshold, the angular velocity ωA3m of the third arm 14 around the rotation axis O3 is input from theangular velocity calculator 5612 of the aforementioned third drivesource controller 203 to the adder-subtractor 6211. Additionally, thedetection signal of the aforementioned third inertia sensor 33, that is,the angular velocity ωA3 of the third arm 14 around the rotation axis O2detected by the third inertia sensor 33 is input to the adder-subtractor6211.

The adder-subtractor 6211 outputs a value, which is obtained bysubtracting the angular velocity ωA2 m and the angular velocity ωA3 mfrom the angular velocity ωA3, to a converter 5811. The value ωA2 s isequivalent to a vibration component (vibration angular velocity) of thetotal angular velocity of the second arm 13 and the third arm 14 aroundthe rotation axis O2. Hereinafter, ωA2 s is referred to as a vibrationangular velocity. In the present embodiment, feedback control isperformed in which the vibration angular velocity ωA2 s (in detail, anangular velocity ωm2 s in the motor 402M that is a value generated onthe basis of the vibration angular velocity ωA2 s) is multiplied by again Ka to be described below and is returned to the input side of thesecond drive source 402. Specifically, feedback control is performed onthe second drive source 402 so that the vibration angular velocity ωA2 sbecomes as close to zero as possible. Accordingly, the vibration in therobot 1 can be suppressed. In addition, the angular velocity of thesecond drive source 402 is controlled in the feedback control.

On the other hand, when the angle θ is smaller than the first thresholdor larger than the second threshold, the angular velocity ωA3 m and theangular velocity ωA2 are not input to the adder-subtractor 6211, and thedetection signal of the aforementioned second inertia sensor 32, thatis, the angular velocity ωA2 of the second arm 13 around the rotationaxis O2 detected by the third inertia sensor 33 is input to theadder-subtractor 6211.

The adder-subtractor 6211 outputs a value ωA2 s, which is obtained bysubtracting the angular velocity ωA2 m from the angular velocity ωA2, tothe converter 5811. The value ωA2 s is equivalent to a vibrationcomponent (vibration angular velocity) of the angular velocity of thesecond arm 13 around the rotation axis O2. Hereinafter, ωA2 s isreferred to as a vibration angular velocity. In the present embodiment,feedback control is performed in which the vibration angular velocityωA2 s (in detail, an angular velocity ωm2 s in the motor 402M that is avalue generated on the basis of the vibration angular velocity ωA2 s) ismultiplied by a gain Ka to be described below and is returned to theinput side of the second drive source 402. Specifically, feedbackcontrol is performed on the second drive source 402 so that thevibration angular velocity ωA2 s becomes as close to zero as possible.Accordingly, the vibration in the robot 1 can be suppressed. Inaddition, the angular velocity of the second drive source 402 iscontrolled in the feedback control.

The converter 5811 converts the vibration angular velocity ωA2 s intothe angular velocity ωm2 s in the second drive source 402, and outputsthe angular velocity ωm2 s to the correction value calculator 5911. Thisconversion can be obtained by multiplying the vibration angular velocityωA2 s by the reduction ratio between the motor 402M of the second drivesource 402 and the second arm 13, that is, in the joint 172.

The correction value calculator 5911 multiplies the angular velocity ωm2s by a gain (feedback gain) Ka that is a predetermined factor, obtains acorrection value (second correction component) Ka·ωm2 s, and outputs thecorrection value Ka·ωm2 s to the adder 6011. In addition, the gain Ka inthe second drive source controller 202, the gain Ka in the first drivesource controller 201, and the gain Ka in the third drive sourcecontroller 203 may be the same or may be different, respectively.

The angular velocity ωm2 and the correction value Ka·ωm2 s are input tothe adder 6011. The adder 6011 outputs an additional value of theangular velocity ωm2 and the correction value Ka·ωm2 s to the subtractor5311 as the angular velocity feedback value ωfb. In addition, thesubsequent operation is the same as the second and third embodiments.

According to the robot 1, the same effects as the aforementioned secondand third embodiments are obtained.

In the robot 1, suitable control can be performed according to the angleθ formed between the axis 131 of the second arm 13 and the axis 141 ofthe third arm 14.

In addition, in the present embodiment, the configuration of the thirddrive source controller 203 is the same as that of the third drivesource controller 203 of the second and third embodiments. However, theinvention is not limited to this, and for example, the third drivesource controller of the present embodiment is the same as that of thethird drive source controller 203 of the first embodiment.

Although a robot has been described on the basis of the illustratedembodiments, the invention is not limited to this, and theconfigurations of the respective portions can be replaced with arbitraryconfigurations having the same functions. Additionally, other arbitrarystructures may be added to the invention.

Additionally, the invention may be provided from the combinations of twoor more arbitrary configurations (features) among the respectiveembodiments.

In addition, the motors of the drive sources include, for example,stepping motors or the like in addition to the servo motors,respectively.

Additionally, in the above embodiments, as the angle sensors, othervarious sensors, such as encoders, resolvers, or potentiometers, whichdetect the rotation angle of rotor of the motors, may be used andvarious sensors, such as tachogenerators, which detect the rotatingspeed of the rotors of the motors, may be used. In addition, when thestepping motors are used as the motor, the rotation angle or rotatingspeed of the rotors of the motors may be detected, for example, bymeasuring the number of driving pulses input to the stepping motors.

Additionally, in the above embodiments, the gyroscope sensors can beused as the inertia sensors. However, the invention is not limited tothese. For example, other various angular velocity sensors that detectthe angular velocity of the arms may be used, and various accelerationsensors that detect the acceleration of the arms may be used. Inaddition, when the acceleration sensors are used, angular velocity iscalculated using the detection values of the acceleration sensors.

Additionally, the types of the angle sensors and the respective inertiasensors are not particularly limited, and include, for example, anoptical type, a magnetic type, an electromagnetic type, an electrictype, or the like.

Additionally, in the above embodiments, the number of rotation axes ofthe robot is six. However, the invention is not limited to this, and thenumber of rotation axes of the robot may be two, three, four, five, orseven or more.

That is, in the above embodiments, the number of arms of the robot issix because the wrist has two arms. However, the invention is notlimited to this, and the number of arms of the robot may be two, three,four, five, or seven or more.

Additionally, in the above embodiments, the robot is a single arm robotthat has one arm coupling body obtained by rotatably coupling aplurality of arms. However, the invention is not limited to this. Forexample, as shown in FIG. 17, robots having a plurality of the armcoupling bodies, such as a double-arm robot 1A having the two armcoupling bodies 18 each obtained by rotatably coupling a plurality ofarms, may be used.

The entire disclosure of Japanese Patent Application No. 2012-191449filed Aug. 31, 2012 is expressly incorporated by reference herein.

What is claimed is:
 1. A robot comprising: a base; a first arm that is coupled to the base and rotates with a first rotation axis as an axial center; a second arm that is coupled to the first arm and rotates with a second rotation axis in a direction orthogonal to the first rotation axis as an axial center; a first drive source that rotates the first arm through a first angular velocity command; a first inertia sensor that is installed at the first arm and detects the angular velocity or acceleration of the first arm around the first rotation axis; a first angle sensor that detects the rotation angle of the first drive source; a second drive source that rotates the second arm through a second angular velocity command; a second inertia sensor that is installed at the second arm and detects the angular velocity or acceleration of the second arm around the second rotation axis; a second angle sensor that detects the rotation angle of the second drive source; a first drive source control unit that feeds back a first correction component, which is derived from an angular velocity ωA1 of the first arm around the first rotation axis obtained from the first inertia sensor and an angular velocity ωA1 m of the first arm around the first rotation axis obtained from the first angle sensor, and controls the first drive source; and a second drive source control unit that feeds back a second correction component, which is derived from an angular velocity ωA2 of the second arm around the second rotation axis obtained from the second inertia sensor, and an angular velocity ωA2 m of the second arm around the second rotation axis obtained from the second angle sensor, and controls the second drive source.
 2. The robot according to claim 1, wherein: the first drive source control unit feeds back the first angular velocity command by the first correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA1 m from the angular velocity ωA1, by a feedback gain; and the second drive source control unit feeds back the second angular velocity command by the second correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m from the angular velocity ωA2, by a feedback gain.
 3. The robot according to claim 1, further comprising: a third arm that rotates with a third rotation axis in a direction parallel to the second rotation axis as an axial center; a third drive source that rotates the third arm through a third angular velocity command; a third inertia sensor that is installed at the third arm and detects the angular velocity or acceleration of the third arm around the second rotation axis; a third angle sensor that detects the rotation angle of the third drive source; and a third drive source control unit that feeds back a third correction component, which is derived from the angular velocity ωA2, an angular velocity ωA3 of the third arm around the second rotation axis obtained from the third inertia sensor, and an angular velocity ωA3 m of the third arm around the third rotation axis obtained from the third angle sensor, and controls the third drive source.
 4. The robot according to claim 3, wherein: the first drive source control unit feeds back the first angular velocity command by the first correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA1 m from the angular velocity ωA1, by a feedback gain; the second drive source control unit feeds back the second angular velocity command by the second correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m from the angular velocity ωA2, by a feedback gain; and the third drive source control unit feeds back the third angular velocity command by the third correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 and the angular velocity ωA3 m from the angular velocity ωA3, by a feedback gain.
 5. A robot comprising: a base; a first arm that is coupled to the base and rotates with a first rotation axis as an axial center; a second arm that is coupled to the first arm and rotates with a second rotation axis in a direction orthogonal to the first rotation axis as an axial center; a third arm that rotates with a third rotation axis in a direction parallel to the second rotation axis as an axial center; a first drive source that rotates the first arm through a first angular velocity command; a first inertia sensor that is installed at the first arm and detects the angular velocity or acceleration of the first arm around the first rotation axis; a first angle sensor that detects the rotation angle of the first drive source; a second drive source that rotates the second arm through a second angular velocity command; a second inertia sensor that is installed at the second arm and detects the angular velocity or acceleration of the second arm around the second rotation axis; a second angle sensor that detects the rotation angle of the second drive source; a third drive source that rotates the third arm through a third angular velocity command; a third inertia sensor that is installed at the third arm and detects the angular velocity or acceleration of the third arm around the second rotation axis; a third angle sensor that detects the rotation angle of the third drive source; a first drive source control unit that feeds back a first correction component, which is derived from an angular velocity ωA1 of the first arm around the first rotation axis obtained from the first inertia sensor and an angular velocity ωA1 m of the first arm around the first rotation axis obtained from the first angle sensor, and controls the first drive source; a second drive source control unit that feeds back a second correction component, which is derived from an angular velocity ωA3 of the third arm around the second rotation axis obtained from the third inertia sensor, an angular velocity ωA2 m of the second arm around the second rotation axis obtained from the second angle sensor, and an angular velocity ωA3 m of the third arm around the third rotation axis obtained from the third angle sensor, and controls the second drive source; and a third drive source control unit that feeds back a third correction component, which is derived from an angular velocity ωA2 of the second arm around the second rotation axis obtained from the second inertia sensor, the angular velocity ωA3, and the angular velocity ωA3 m, and controls the third drive source.
 6. The robot according to claim 5, wherein: the first drive source control unit feeds back the first angular velocity command by the first correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA1 m from the angular velocity ωA1, by a feedback gain; the second drive source control unit feeds back the second angular velocity command by the second correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m and the angular velocity ωA3 m from the angular velocity ωA3, by a feedback gain; and the third drive source control unit feeds back the third angular velocity command by the third correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 and the angular velocity ωA3 m from the angular velocity ωA3, by a feedback gain.
 7. A robot comprising: a base; a first arm that is coupled to the base and rotates with a first rotation axis as an axial center; a second arm that is coupled to the first arm and rotates with a second rotation axis in a direction orthogonal to the first rotation axis as an axial center; a third arm that rotates with a third rotation axis in a direction parallel to the second rotation axis as an axial center; a first drive source that rotates the first arm through a first angular velocity command; a first inertia sensor that is installed at the first arm and detects the angular velocity or acceleration of the first arm around the first rotation axis; a first angle sensor that detects the rotation angle of the first drive source; a second drive source that rotates the second arm through a second angular velocity command; a second inertia sensor that is installed at the second arm and detects the angular velocity or acceleration of the second arm around the second rotation axis; a second angle sensor that detects the rotation angle of the second drive source; a third drive source that rotates the third arm through a third angular velocity command; a third inertia sensor that is installed at the third arm and detects the angular velocity or acceleration of the third arm around the second rotation axis; a third angle sensor that detects the rotation angle of the third drive source; an angle detection unit that detects the arm angle formed between a longitudinal axis of the second arm and a longitudinal axis of the third arm; a first drive source control unit that feeds back a first correction component, which is derived from an angular velocity ωA1 of the first arm around the first rotation axis of obtained from the first inertia sensor and an angular velocity ωA1 m of the first arm around the first rotation axis obtained from the first angle sensor, and controls the first drive source; a second drive source control unit that feeds back either a value which is derived from an angular velocity ωA3 of the third arm around the second rotation axis obtained from the third inertia sensor, an angular velocity ωA2 m of the second arm around the second rotation axis obtained from the second angle sensor, and an angular velocity ωA3 m of the third arm around the third rotation axis obtained from the third angle sensor, or a value which is derived from an angular velocity ωA2 of the second arm around the second rotation axis obtained from the second inertia sensor, and the angular velocity ωA2 m, as a second correction component according to the arm angle, and controls the second drive source; and a third drive source control unit that feeds back a third correction component, which is derived from the angular velocity ωA2, the angular velocity ωA3, and the angular velocity ωA3 m, and controls the third drive source.
 8. The robot according to claim 7, wherein: the first drive source control unit feeds back the first angular velocity command by the first correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA1 m from the angular velocity ωA1, by a feedback gain; the second drive source control unit feeds back the second angular velocity command, using either a value obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m and the angular velocity ωA3 m from the angular velocity ωA3, by a feedback gain, or a value obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m from the angular velocity ωA2, by a feedback gain, as the second correction component; and the third drive source control unit feeds back the third angular velocity command by the third correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 and the angular velocity ωA3 m from the angular velocity ωA3, by a feedback gain.
 9. The robot according to claim 7, wherein: the second drive source control unit feeds back the second angular velocity command by the second correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m and the angular velocity ωA3 m from the angular velocity ωA3, by a feedback gain when the arm angle is equal to or larger than a first threshold and is equal to or smaller than a second threshold that is larger than the first threshold and that feeds back the second angular velocity command by the second correction component obtained by multiplying a value, which is obtained by subtracting the angular velocity ωA2 m from the angular velocity ωA2, by a feedback gain when the arm angle is smaller than the first threshold or larger than the second threshold.
 10. The robot according to claim 9, wherein the first threshold is set within a range of 45° to 135°, and the second threshold is set within a range of 225° to 315°.
 11. The robot according to claim 1, wherein the first inertia sensor is installed at a tip portion of the first arm, and the second inertia sensor is installed at a tip portion of the second arm.
 12. The robot according to claim 3, wherein the first inertia sensor is installed at a tip portion of the first arm, the second inertia sensor is installed at a tip portion of the second arm, and the third inertia sensor is installed at a tip portion of the third arm.
 13. The robot according to claim 1, wherein the first rotation axis coincides with a normal line of an installation surface of the base.
 14. A robot comprising: a base; a first arm that is coupled to the base and rotates with a first rotation axis as an axial center; a second arm that rotates with a second rotation axis orthogonal to the first rotation axis as an axial center; a first inertia sensor that detects the angular velocity or acceleration of the first arm; a first angle sensor that detects the rotation angle of a first drive source of the first arm; a second inertia sensor that detects the angular velocity or acceleration of the second arm; a second angle sensor that detects the rotation angle of a second drive source of the second arm; a first control unit of the first drive source of the first arm that feeds back an angular velocity derived from a detection result of the first angle sensor and an angular velocity detected from the first inertia sensor; and a second control unit of the second drive source of the second arm that feeds back an angular velocity derived from a detection result of the second angle sensor and an angular velocity detected from the second inertia sensor. 